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New paper compares technologies for UHP gas analysis

You are here: Home / Industry Feed / New paper compares technologies for UHP gas analysis

September 16, 2020 by realisma

Mass spectrometry and gas chromatography are both methods which offer ultra-trace gas analysis solutions for the quality assurance of gases used in the semiconductor manufacturing industry.

With its new expert paper, Servomex aims to provide readers with an in-depth look at the positive and negative factors of each method and examine the different performance factors for each method when used with continuous quality control instrumentation.

The GC-PED technology discussed in the paper is a key feature of Servomex’s new SERVOPRO NanoChrone ULTRA multi-gas analyser. The NanoChrome ULTRA is a flagship component of the new ULTRA Series of UHP gas analysers.

Servomex’s ULTRA Series is due to be launched at the upcoming Semicon Taiwan exhibition in Taipei between 23rd-25th September.

The full paper can be accessed here. 

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