The company’s new edition meets semiconductor process requirements and addresses emerging application challenges in the semiconductor, display, LED and solar PV manufacturing processes.
“The new iXH Mk2 dry pump provides an even longer service life then previous generations for the harshest of processes. It can also provide significant improvements in power efficiency,” said Al Brightman, Senior Project Manager at Edwards.
“Leveraging 100 years of technology innovation, we have ‘reset the bar’ for harsh process capability, reliability and low cost-of-ownership. The iXH reduces the environmental impact of some of the harshest processes used in semiconductor manufacturing,” said Brightman.
Edwards will showcase its iXH Mk2 solution at SEMICON® China, taking place on 20th-22ndMarch (2019), SNIEC, Shanghai (booth 1309 FPD China).